diff --git a/arch/arm/src/sama5/chip/sama5d2x_memorymap.h b/arch/arm/src/sama5/chip/_sama5d2x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d2x_memorymap.h
rename to arch/arm/src/sama5/chip/_sama5d2x_memorymap.h
index bedf8177cc8..b48003eba79 100644
--- a/arch/arm/src/sama5/chip/sama5d2x_memorymap.h
+++ b/arch/arm/src/sama5/chip/_sama5d2x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/sama5d2x_memorymap.h
+ * arch/arm/src/sama5/_sama5d2x_memorymap.h
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -884,4 +884,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/sama5d2x_pinmap.h b/arch/arm/src/sama5/chip/_sama5d2x_pinmap.h
similarity index 100%
rename from arch/arm/src/sama5/chip/sama5d2x_pinmap.h
rename to arch/arm/src/sama5/chip/_sama5d2x_pinmap.h
diff --git a/arch/arm/src/sama5/chip/sama5d2x_pio.h b/arch/arm/src/sama5/chip/_sama5d2x_pio.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d2x_pio.h
rename to arch/arm/src/sama5/chip/_sama5d2x_pio.h
index 610ddd58101..a821e56d84b 100644
--- a/arch/arm/src/sama5/chip/sama5d2x_pio.h
+++ b/arch/arm/src/sama5/chip/_sama5d2x_pio.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/samv7/chip/sama5d2x_pio.h
+ * arch/arm/src/samv7/chip/_sama5d2x_pio.h
  * Parallel Input/Output (PIO) Controller definitions for the SAMA5D2
  *
  *   Copyright (C) 2015 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_PIO_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_PIO_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H
 
 /****************************************************************************************
  * Included Files
@@ -334,4 +334,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D2X_PIO_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D2X_PIO_H */
diff --git a/arch/arm/src/sama5/chip/sama5d3x4x_pio.h b/arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d3x4x_pio.h
rename to arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
index e77d12b1b71..0516d6981ed 100644
--- a/arch/arm/src/sama5/chip/sama5d3x4x_pio.h
+++ b/arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
@@ -1,5 +1,5 @@
 /****************************************************************************************
- * arch/arm/src/sama5/chip/sama5d3x4x_pio.h
+ * arch/arm/src/sama5/chip/_sama5d3x4x_pio.h
  * Parallel Input/Output (PIO) Controller definitions for the SAMA5D3x and SAMA5D4x
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
@@ -34,8 +34,8 @@
  *
  ****************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3DX4X_PIO_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3DX4X_PIO_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H
 
 /****************************************************************************************
  * Included Files
@@ -645,4 +645,4 @@
  * Public Functions
  ****************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3DX4X_PIO_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3DX4X_PIO_H */
diff --git a/arch/arm/src/sama5/chip/sama5d3x_memorymap.h b/arch/arm/src/sama5/chip/_sama5d3x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d3x_memorymap.h
rename to arch/arm/src/sama5/chip/_sama5d3x_memorymap.h
index 0726692a8cb..ecac5f2056f 100644
--- a/arch/arm/src/sama5/chip/sama5d3x_memorymap.h
+++ b/arch/arm/src/sama5/chip/_sama5d3x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/sama5d3x_memorymap.h
+ * arch/arm/src/sama5/_sama5d3x_memorymap.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -808,4 +808,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/sama5d3x_mpddrc.h b/arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d3x_mpddrc.h
rename to arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
index 8ffc067fa84..bbf21ce4642 100644
--- a/arch/arm/src/sama5/chip/sama5d3x_mpddrc.h
+++ b/arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/chip/sama5d3x_mpddrc.h
+ * arch/arm/src/sama5/chip/_sama5d3x_mpddrc.h
  *
  *   Copyright (C) 2013-2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MPDDRC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MPDDRC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H
 
 /************************************************************************************
  * Included Files
@@ -402,4 +402,4 @@
 #define MPDDRC_WPSR_WPVSRC_SHIFT        (8)       /* Bits 8-23: Write Protection Violation Source */
 #define MPDDRC_WPSR_WPVSRC_MASK         (0xffff << MPDDRC_WPSR_WPVSRC_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_MPDDRC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_MPDDRC_H */
diff --git a/arch/arm/src/sama5/chip/sama5d3x_pinmap.h b/arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d3x_pinmap.h
rename to arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
index b9544671c21..a18e7272aa5 100644
--- a/arch/arm/src/sama5/chip/sama5d3x_pinmap.h
+++ b/arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************************************
- * arch/arm/src/sama5/chip/sama5d3x_pinmap.h
+ * arch/arm/src/sama5/chip/_sama5d3x_pinmap.h
  *
  *   Copyright (C) 2013 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H
 
 /************************************************************************************************************
  * Included Files
@@ -410,4 +410,4 @@
 #define PIO_USART3_SCK    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN15) /* Type: EBI */
 #define PIO_USART3_TXD    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN19) /* Type: EBI */
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D3X_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D3X_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/sama5d4x_memorymap.h b/arch/arm/src/sama5/chip/_sama5d4x_memorymap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d4x_memorymap.h
rename to arch/arm/src/sama5/chip/_sama5d4x_memorymap.h
index dbf25fa22d4..46c203a2936 100644
--- a/arch/arm/src/sama5/chip/sama5d4x_memorymap.h
+++ b/arch/arm/src/sama5/chip/_sama5d4x_memorymap.h
@@ -1,5 +1,5 @@
 /************************************************************************************
- * arch/arm/src/sama5/sama5d4x_memorymap.h
+ * arch/arm/src/sama5/_sama5d4x_memorymap.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MEMORYMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MEMORYMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H
 
 /************************************************************************************
  * Included Files
@@ -802,4 +802,4 @@
  * Public Functions
  ************************************************************************************/
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MEMORYMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MEMORYMAP_H */
diff --git a/arch/arm/src/sama5/chip/sama5d4x_mpddrc.h b/arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d4x_mpddrc.h
rename to arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
index cf23d7c727e..24880165bf7 100644
--- a/arch/arm/src/sama5/chip/sama5d4x_mpddrc.h
+++ b/arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
@@ -1,5 +1,5 @@
 /********************************************************************************************
- * arch/arm/src/sama5/chip/sama5d4x_mpddrc.h
+ * arch/arm/src/sama5/chip/_sama5d4x_mpddrc.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ********************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MPDDRC_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MPDDRC_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H
 
 /********************************************************************************************
  * Included Files
@@ -687,4 +687,4 @@
 #define MPDDRC_DLL_SAD_ADDCNT_MASK           (0xff < MPDDRC_DLL_SAD_ADDCNT_SHIFT)
 #  define MPDDRC_DLL_SAD_ADDCNT(n)           ((uint32_t)(n) < MPDDRC_DLL_SAD_ADDCNT_SHIFT)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_MPDDRC_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_MPDDRC_H */
diff --git a/arch/arm/src/sama5/chip/sama5d4x_pinmap.h b/arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
similarity index 99%
rename from arch/arm/src/sama5/chip/sama5d4x_pinmap.h
rename to arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
index f98554079f8..1262fa9c15e 100644
--- a/arch/arm/src/sama5/chip/sama5d4x_pinmap.h
+++ b/arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
@@ -1,5 +1,5 @@
 /************************************************************************************************************
- * arch/arm/src/sama5/chip/sama5d4x_pinmap.h
+ * arch/arm/src/sama5/chip/_sama5d4x_pinmap.h
  *
  *   Copyright (C) 2014 Gregory Nutt. All rights reserved.
  *   Author: Gregory Nutt <gnutt@nuttx.org>
@@ -33,8 +33,8 @@
  *
  ************************************************************************************************************/
 
-#ifndef __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_PINMAP_H
-#define __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_PINMAP_H
+#ifndef __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H
+#define __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H
 
 /************************************************************************************************************
  * Included Files
@@ -473,4 +473,4 @@
 #define PIO_USART4_SCK    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN25)
 #define PIO_USART4_TXD    (PIO_PERIPHB | PIO_CFG_DEFAULT | PIO_PORT_PIOE | PIO_PIN27)
 
-#endif /* __ARCH_ARM_SRC_SAMA5_CHIP_SAMA5D4X_PINMAP_H */
+#endif /* __ARCH_ARM_SRC_SAMA5_CHIP__SAMA5D4X_PINMAP_H */
diff --git a/arch/arm/src/sama5/chip/sam_memorymap.h b/arch/arm/src/sama5/chip/sam_memorymap.h
index 1ab773ba2ba..73ecf13aecd 100644
--- a/arch/arm/src/sama5/chip/sam_memorymap.h
+++ b/arch/arm/src/sama5/chip/sam_memorymap.h
@@ -44,11 +44,11 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/sama5d2x_memorymap.h"
+#  include "chip/_sama5d2x_memorymap.h"
 #elif defined(ATSAMA5D3)
-#  include "chip/sama5d3x_memorymap.h"
+#  include "chip/_sama5d3x_memorymap.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/sama5d4x_memorymap.h"
+#  include "chip/_sama5d4x_memorymap.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
diff --git a/arch/arm/src/sama5/chip/sam_mpddrc.h b/arch/arm/src/sama5/chip/sam_mpddrc.h
index 9e58dbde049..06b217d8aaa 100644
--- a/arch/arm/src/sama5/chip/sam_mpddrc.h
+++ b/arch/arm/src/sama5/chip/sam_mpddrc.h
@@ -44,9 +44,9 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D3)
-#  include "chip/sama5d3x_mpddrc.h"
+#  include "chip/_sama5d3x_mpddrc.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/sama5d4x_mpddrc.h"
+#  include "chip/_sama5d4x_mpddrc.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
diff --git a/arch/arm/src/sama5/chip/sam_pinmap.h b/arch/arm/src/sama5/chip/sam_pinmap.h
index bc04679c19d..461fb1f545b 100644
--- a/arch/arm/src/sama5/chip/sam_pinmap.h
+++ b/arch/arm/src/sama5/chip/sam_pinmap.h
@@ -44,11 +44,11 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/sama5d2x_pinmap.h"
+#  include "chip/_sama5d2x_pinmap.h"
 #elif defined(ATSAMA5D3)
-#  include "chip/sama5d3x_pinmap.h"
+#  include "chip/_sama5d3x_pinmap.h"
 #elif defined(ATSAMA5D4)
-#  include "chip/sama5d4x_pinmap.h"
+#  include "chip/_sama5d4x_pinmap.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
diff --git a/arch/arm/src/sama5/chip/sam_pio.h b/arch/arm/src/sama5/chip/sam_pio.h
index 2e9806fff15..7a37fe6cfa0 100644
--- a/arch/arm/src/sama5/chip/sam_pio.h
+++ b/arch/arm/src/sama5/chip/sam_pio.h
@@ -44,9 +44,9 @@
 #include <arch/sama5/chip.h>
 
 #if defined(ATSAMA5D2)
-#  include "chip/sama5d2x_pio.h"
+#  include "chip/_sama5d2x_pio.h"
 #elif defined(ATSAMA5D3) || defined(ATSAMA5D4)
-#  include "chip/sama5d3x4x_pio.h"
+#  include "chip/_sama5d3x4x_pio.h"
 #else
 #  error Unrecognized SAMA5 architecture
 #endif
diff --git a/arch/arm/src/sama5/sama5d2x_pio.c b/arch/arm/src/sama5/sama5d2x_pio.c
index 6b35b7aa190..3ea9279c5de 100644
--- a/arch/arm/src/sama5/sama5d2x_pio.c
+++ b/arch/arm/src/sama5/sama5d2x_pio.c
@@ -51,7 +51,7 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/sama5d2x_pio.h"
+#include "chip/_sama5d2x_pio.h"
 
 #include "chip.h"
 #include "sam_periphclks.h"
diff --git a/arch/arm/src/sama5/sama5d3x4x_pio.c b/arch/arm/src/sama5/sama5d3x4x_pio.c
index 247b8af54fd..c152fe26ed4 100644
--- a/arch/arm/src/sama5/sama5d3x4x_pio.c
+++ b/arch/arm/src/sama5/sama5d3x4x_pio.c
@@ -51,7 +51,7 @@
 #include "up_internal.h"
 #include "up_arch.h"
 
-#include "chip/sama5d3x4x_pio.h"
+#include "chip/_sama5d3x4x_pio.h"
 
 #include "chip.h"
 #include "sam_periphclks.h"