diff --git a/arch/xtensa/src/esp32/esp32_efuse.c b/arch/xtensa/src/esp32/esp32_efuse.c
index 27815ac0451..210097a1750 100644
--- a/arch/xtensa/src/esp32/esp32_efuse.c
+++ b/arch/xtensa/src/esp32/esp32_efuse.c
@@ -32,7 +32,7 @@
 #include "xtensa.h"
 #include "esp32_efuse.h"
 #include "esp32_clockconfig.h"
-#include "hardware/efuse_reg.h"
+#include "hardware/esp32_efuse.h"
 
 /****************************************************************************
  * Pre-processor Definitions
diff --git a/arch/xtensa/src/esp32/esp32_psram.c b/arch/xtensa/src/esp32/esp32_psram.c
index fb87e0ed8e8..99e1504ca17 100644
--- a/arch/xtensa/src/esp32/esp32_psram.c
+++ b/arch/xtensa/src/esp32/esp32_psram.c
@@ -44,7 +44,7 @@
 
 #include "rom/esp32_efuse.h"
 #include "rom/esp32_spiflash.h"
-#include "hardware/efuse_reg.h"
+#include "hardware/esp32_efuse.h"
 
 #ifdef CONFIG_ESP32_SPIRAM
 
diff --git a/arch/xtensa/src/esp32/esp32_spiflash.c b/arch/xtensa/src/esp32/esp32_spiflash.c
index 241679f0ab4..b9c709acb24 100644
--- a/arch/xtensa/src/esp32/esp32_spiflash.c
+++ b/arch/xtensa/src/esp32/esp32_spiflash.c
@@ -51,7 +51,7 @@
 #include "hardware/esp32_soc.h"
 #include "hardware/esp32_spi.h"
 #include "hardware/esp32_dport.h"
-#include "hardware/efuse_reg.h"
+#include "hardware/esp32_efuse.h"
 
 #include "esp32_spicache.h"
 #ifdef CONFIG_ESP32_SPIRAM
diff --git a/arch/xtensa/src/esp32/hardware/efuse_reg.h b/arch/xtensa/src/esp32/hardware/esp32_efuse.h
similarity index 99%
rename from arch/xtensa/src/esp32/hardware/efuse_reg.h
rename to arch/xtensa/src/esp32/hardware/esp32_efuse.h
index 8ec7b6ea21a..0364ffb2709 100644
--- a/arch/xtensa/src/esp32/hardware/efuse_reg.h
+++ b/arch/xtensa/src/esp32/hardware/esp32_efuse.h
@@ -1,5 +1,5 @@
 /****************************************************************************
- * arch/xtensa/src/esp32/hardware/efuse_reg.h
+ * arch/xtensa/src/esp32/hardware/esp32_efuse.h
  *
  * Licensed to the Apache Software Foundation (ASF) under one or more
  * contributor license agreements.  See the NOTICE file distributed with
@@ -18,8 +18,8 @@
  *
  ****************************************************************************/
 
-#ifndef __ARCH_XTENSA_SRC_ESP32_HARDWARE_EFUSE_REG_H
-#define __ARCH_XTENSA_SRC_ESP32_HARDWARE_EFUSE_REG_H
+#ifndef __ARCH_XTENSA_SRC_ESP32_HARDWARE_ESP32_EFUSE_H
+#define __ARCH_XTENSA_SRC_ESP32_HARDWARE_ESP32_EFUSE_H
 
 /****************************************************************************
  * Included Files
@@ -1824,4 +1824,4 @@
 #define EFUSE_DATE_V                   0xffffffff
 #define EFUSE_DATE_S                   0
 
-#endif /* __ARCH_XTENSA_SRC_ESP32_HARDWARE_EFUSE_REG_H */
+#endif /* __ARCH_XTENSA_SRC_ESP32_HARDWARE_ESP32_EFUSE_H */